The first nanoengineering program was started at the University of Toronto within the Engineering Science program as one of the options of study in the final years. In 2003, the Lund Institute of Technology started a program in Nanoengineering. In 2004, the College of Nanoscale Science and Engineering at SUNY Polytechnic Institute was established on the campus of the University at Albany. In 2005, the University of Waterloo established a unique program which offers a full degree in Nanotechnology Engineering.  Louisiana Tech University started the first program in the U.S. in 2005. In 2006 the University of Duisburg-Essen started a Bachelor and a Master program NanoEngineering.  Unlike early NanoEngineering programs, the first Nanoengineering Department in the world, offering both undergraduate and graduate degrees, was established by the University of California, San Diego in 2007.
In 2009, the University of Toronto began offering all Options of study in Engineering Science as degrees, bringing the second nanoengineering degree to Canada. Rice University established in 2016 a Department of Materials Science and NanoEngineering (MSNE).
DTU Nanotech - the Department of Micro- and Nanotechnology - is a department at the Technical University of Denmark established in 1990.
In 2013, Wayne State University began offering a Nanoengineering Undergraduate Certificate Program, which is funded by a Nanoengineering Undergraduate Education (NUE) grant from the National Science Foundation. The primary goal is to offer specialized undergraduate training in nanotechnology. Other goals are: 1) to teach emerging technologies at the undergraduate level, 2) to train a new adaptive workforce, and 3) to retrain working engineers and professionals.